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A Residual Gas Analyzer (RGA) can characterize the gas composition inside a chamber under vacuum. This makes it possible to identify problem gases in a process (such as water vapor), but accurate quantification of gases can only be achieved if the RGA is properly calibrated.
Similar to leak detection equipment, a Residual Gas Analyzer can be calibrated using one or more leak standards. Available in a variety of gases over a wide range of leak rates, a leak standard is helpful in proving the RGA’s sensitivity, verifying its ability to distinguish between gases, and establishing a quantifying reference value.
Leak standards can be made with a single gas, or with a mixture that contains any number of gases in a known concentration.
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