 |
Vacuum Valves:
Series 150 160 Single Stage Isolation Valves
Description HPS manufactures a complete line of bellows sealed inline vacuum valves. ISO-KF, ISO-Universal, ASA, CF flanging, and weld stubs are available in sizes from 3/4" to 6".
|
 |
|
 |
Features Series 160 valves have been designed for long life in high cycle applications. Their inherent simplicity and excellent design have allowed them to be used in semiconductor production systems with chemical and particulate contamination as well as highly sophisticated research applications in plasma physics and nuclear accelerators. Lifetimes of several hundred thousand cycles are commonly achieved.
|
|
Additional Information
Series 150/160 Single Stage Isolation Valves Brochure (PDF)
|