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| Name |
Description |
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CV Compact High Conductance Valves
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High conductance, compact, durable and dependable design make the HPS Cv angle and inline valves the foremost choice for today's high vacuum process needs. |
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Bellows Sealed Poppet Valves
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HPS LoPro valves are a line of extremely compact angle and inline valves. Since the valves have a small footprint, they require less space on the system. The valves are constructed of high purity stainless steel and contain formed bellows. |
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Series 150 160 Single Stage Isolation Valves
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HPS manufactures a complete line of bellows sealed inline vacuum valves. ISO-KF, ISO-Universal, ASA, CF flanging, and weld stubs are available in sizes from 3/4" to 6". |
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UHV Metal-Sealed Vacuum Isolation Valves
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The HPS UHV NW 25 or NW 40 Valve is a compact vacuum valve designed for use in ultra-high vacuum systems, for physical vapor deposition, high energy physics, mass spectrometry and other applications that require an ultraclean environment. |
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Electromagnetic Valves
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A vacuum rated normally closed solenoid valve ideal for venting and isolation. NW 16 connections, brass construction. Available in 24 vdc and 120 vac voltages |
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Gate Valves
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Manual and pneumatic operated available in sizes from 2" to 8" in ASA, ISO, or UHV (CF) connections. |
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Control Valves
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MKS Instruments offers a high quality pressure control system using a butterfly valves and controller. Ideal for sputtering, plasma processing, and other vacuum applications requiring pressure control. |
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Manual Vacuum Toggle Valves
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Inline and Right Angle manual isolation valves in either SS or Al construction. Available in NW 16, NW 25, NW 40 and NW 50 connections. Quick acting lever operated valves with o-ring seal. Operating pressure 30 psi to 7.5 x 10^-10 torr l/s |