Turbo Vacuum Pumps from LACO Technologies

The ATP family of turbo pumps available in standard, corrosive, and high pressure designs. The ATP design is focused on reliability and robustness with performance well adapted to three main application fields: high vacuum applications, corrosive gas pumping, and semiconductor applications.

Features

Pumping speeds from 80 to 900 l/s.
Suitable for a variety of heavy duty applications
Robust construction ensures resistance to air inrushes
Low rotational speed results in long bearling life

Specifations

Pumping speeds from 80 to 900 l/s.
Ultimate pressure range of 10¹⁰ mbar

Applications

High vacuum applications
Corrosive gas pumping
Semiconductor applications
Space simulation
Thin film desposition
Ion pump evacuation
UHV system
Particles accelerator
Ion source
Surface analysis
Mass spectrometer
Scanning electron microscope
Leak detection

High vacuum applications
The five pumps of the standard series produce a clean vacuum in the 10^-10 mbar range. The ATP series has many applications in industry, research and development and analytical instruments.

Corrosive gas pumping
Some applications require corrosive gas pumping. The five pumps of the "C" series are well protected against the corrosion effects.

Semiconductor applications
The manufacturing of semiconductor devices uses corrosive gases with high throughput and high pressure conditions. The two pumps of the "HPC" version are dedicated to semi-conductor applications.

Brochures
- Alcatel ATP Series Pump Brochure (PDF)

Vacuum Pumps

Alcatel ATP Turbo Pumps

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APPLICATIONS

VACUUM TECHNOLOGY

LEAK TESTING

CALIBRATED LEAKS

SERVICES