Semiconductor company required a vacuum system to move parts in and out of a clean environment. The customer part (a welding enclosure purged with nitrogen) required an interlocked system so the part can pass through the chamber without compromising the nitrogen purge. 

We engineered a custom vacuum system with a custom cube chamber featuring dual doors (room side door and weld side door) with proximity sensors and interlocks to ensure a clean environment. When the part enters the chamber through the room side door, the chamber evacuates to 0.1 Torr and is then backfilled with nitrogen. 

KEY FEATURES

  • Dual door chamber includes proximity sensors and interlocks to prevent both doors from being open at the same time
  • VC-2500 Vacuum Controller 
  • Nitrogen backfill port  and pressure relief port