Manufacturer of semiconductor components required a cost-effective high temperature bake-out system to operate below 10-5 Torr for critical components. We engineered a high vacuum bake-out system using the more cost-effective valve logic in lieu of a gate valve on the turbo pump. Vacuum chamber based on our standard Series HH 12" X 18" vacuum chamber.

KEY FEATURES

  • Fully integrated vacuum system mounted on mobile cart 
  • Cost-effective alternative to gate valves
  • Horizontal/front loading chamber with full access swing hinge door and quick door clamp closures
  • Custom ports with multiple feedthroughs