Manufacturer of semiconductor components required a cost-effective high temperature bake-out system to operate below 10-5 Torr for critical components. We engineered a high vacuum bake-out system using the more cost-effective valve logic in lieu of a gate valve on the turbo pump. Vacuum chamber based on our standard Series HH 12" X 18" vacuum chamber.
- Fully integrated vacuum system mounted on mobile cart
- Cost-effective alternative to gate valves
- Horizontal/front loading chamber with full access swing hinge door and quick door clamp closures
- Custom ports with multiple feedthroughs